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Apex / Hyper / STREAM PLUS
| QVH Apex302 | Hyper QVH302 | QVH Apex404 | Hyper QVH404 | QVH Apex606 | Hyper QVH606 | |||
| QVH STREAM 302 | QVH STREAM 404 | QVH STREAM 606 | ||||||
| 测量范围(X×Y×Z) | 影像 | 300×200×200mm | 400×400×250mm | 600×650×250mm | ||||
| 非接触式位移传感器 | 1型 | 180×200×200mm | 280×400×250mm | 480×650×250mm | ||||
| 4型*1 | 176×200×200mm | 276×400×250mm | 476×650×250mm | |||||
| 测量精度(影像)*1 | E1X, E1Y | (1.5+3L/1000)μm | (0.8+2L/1000)μm | (1.5+3L/1000)μm | (0.8+2L/1000)μm | (1.5+3L/1000)μm | (0.8+2L/1000)μm | |
| E1Z | (1.5+4L/1000)μm | (1.5+2L/1000)μm | (1.5+4L/1000)μm | (1.5+2L/1000)μm | (1.5+4L/1000)μm | (1.5+2L/1000)μm | ||
| E2XY | (2.0+4L/1000)μm | (1.4+3L/1000)μm | (2.0+4L/1000)μm | (1.4+3L/1000)μm | (2.0+4L/1000)μm | (1.4+3L/1000)μm | ||
| 测量精度(位移传感器)*1 | E1Z | (1.5+4L/1000)μm | (1.5+2L/1000)μm | (1.5+4L/1000)μm | (1.5+2L/1000)μm | (1.5+4L/1000)μm | (1.5+2L/1000)μ | |
ACCEL
| QVH ACCEL808 | QVH ACCEL1010 | QVH ACCEL1212 | QVH ACCEL1517 | |||
| 测量范围(X×Y×Z) | 影像 | 800×800×150mm | 1000×1000×150mm | 1250×1250×100mm | 1500×1750×100mm | |
| 非接触式位移传感器 | 1型 | 680×800×150mm | 880×1000×150mm | 1130×1250×100mm | 1380×1750×100mm | |
| 测量精度(影像)*1 | E1X, E1Y | (1.5+3L/1000)μm | (2.2+3L/1000)μm | |||
| E1Z | (1.5+4L/1000)μm | (2.5+5L/1000)μm | ||||
| E2XY | (2.5+4L/1000)μm | (3.5+4L/1000)μm | ||||
| 测量精度(位移传感器)*1 | E1Z | (2.5+4L/1000)μm | (3.5+5L/1000)μm | |||
*1：根据本公司检查方法，L为任意两点间的尺寸（mm)
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